柴氏拉(la)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)法(Czochralski method) 簡(jian)稱(cheng)CZ法。從熔(rong)(rong)體(ti)(ti)中(zhong)提拉(la)生(sheng)(sheng)長(chang)(chang)(chang)(chang)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)的(de)(de)(de)(de)(de)(de)方法為Czochralski于1918年,自1964年Poladino和Rotter首(shou)先應用到(dao)(dao)(dao)藍(lan)寶石單晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)的(de)(de)(de)(de)(de)(de)生(sheng)(sheng)長(chang)(chang)(chang)(chang)中(zhong),成(cheng)(cheng)功(gong)生(sheng)(sheng)長(chang)(chang)(chang)(chang)出質量較高的(de)(de)(de)(de)(de)(de)藍(lan)寶石晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti),晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)生(sheng)(sheng)長(chang)(chang)(chang)(chang)示意(yi)(yi)圖如圖11所示。先將原料(liao)加(jia)熱(re)至(zhi)熔(rong)(rong)點后(hou)熔(rong)(rong)溫度(du)差(cha)(cha)而形(xing)(xing)成(cheng)(cheng)過(guo)冷。于是(shi)(shi)熔(rong)(rong)湯開(kai)始(shi)在晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)種表面凝(ning)固并生(sheng)(sheng)長(chang)(chang)(chang)(chang)和晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)種相同(tong)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)結構的(de)(de)(de)(de)(de)(de)單晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)。晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)種同(tong)時(shi)以(yi)極緩(huan)慢的(de)(de)(de)(de)(de)(de)速(su)(su)度(du)往上(shang)拉(la)升(sheng),并伴隨以(yi)一定(ding)的(de)(de)(de)(de)(de)(de)轉速(su)(su)旋轉,隨著晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)種的(de)(de)(de)(de)(de)(de)向(xiang)上(shang)拉(la)升(sheng),熔(rong)(rong)湯逐漸凝(ning)固于晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)種的(de)(de)(de)(de)(de)(de)液固界(jie)面上(shang),進而形(xing)(xing)成(cheng)(cheng)一軸對稱(cheng)的(de)(de)(de)(de)(de)(de)單晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)。每(mei)個部份都(dou)有其用意(yi)(yi),生(sheng)(sheng)長(chang)(chang)(chang)(chang)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)頸主要(yao)(yao)(yao)是(shi)(shi)用來(lai)消除差(cha)(cha)排(pai)。因為長(chang)(chang)(chang)(chang)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)過(guo)程復(fu)雜,差(cha)(cha)排(pai)產生(sheng)(sheng)量不易支配(pei),所以(yi)大(da)(da)部分(fen)的(de)(de)(de)(de)(de)(de)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)生(sheng)(sheng)長(chang)(chang)(chang)(chang)過(guo)程,都(dou)以(yi)消除差(cha)(cha)排(pai)為主要(yao)(yao)(yao)選(xuan)擇。長(chang)(chang)(chang)(chang)完晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)頸后(hou),需放慢拉(la)升(sheng)速(su)(su)度(du),使(shi)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)直(zhi)(zhi)徑(jing)增大(da)(da)到(dao)(dao)(dao)所需的(de)(de)(de)(de)(de)(de)尺寸,此步驟為晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)冠生(sheng)(sheng)長(chang)(chang)(chang)(chang)。當晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)直(zhi)(zhi)徑(jing)增大(da)(da)到(dao)(dao)(dao)所需尺寸時(shi),就(jiu)以(yi)等速(su)(su)的(de)(de)(de)(de)(de)(de)速(su)(su)度(du)來(lai)拉(la)升(sheng),此部分(fen)的(de)(de)(de)(de)(de)(de)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)直(zhi)(zhi)徑(jing)是(shi)(shi)固定(ding)的(de)(de)(de)(de)(de)(de),也(ye)就(jiu)是(shi)(shi)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)身(shen)部分(fen)。此部分(fen)就(jiu)是(shi)(shi)要(yao)(yao)(yao)作為工業用基板材料(liao)的(de)(de)(de)(de)(de)(de)部份,所以(yi)生(sheng)(sheng)長(chang)(chang)(chang)(chang)時(shi),需格外(wai)小心。當晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)身(shen)長(chang)(chang)(chang)(chang)完時(shi),就(jiu)要(yao)(yao)(yao)使(shi)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)離開(kai)熔(rong)(rong)湯,此時(shi)拉(la)升(sheng)的(de)(de)(de)(de)(de)(de)速(su)(su)度(du)會變快,使(shi)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)的(de)(de)(de)(de)(de)(de)直(zhi)(zhi)徑(jing)縮小,直(zhi)(zhi)到(dao)(dao)(dao)變成(cheng)(cheng)點狀(zhuang)時(shi),再從熔(rong)(rong)湯中(zhong)分(fen)開(kai)。此步驟為晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)尾生(sheng)(sheng)長(chang)(chang)(chang)(chang),其目的(de)(de)(de)(de)(de)(de)是(shi)(shi)要(yao)(yao)(yao)避免晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)與熔(rong)(rong)湯快速(su)(su)分(fen)離時(shi),所產生(sheng)(sheng)的(de)(de)(de)(de)(de)(de)熱(re)應力,若在分(fen)離時(shi)產生(sheng)(sheng)熱(re)應力,此熱(re)應力將使(shi)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)產生(sheng)(sheng)差(cha)(cha)排(pai)及滑移(yi)線等問題。在現在的(de)(de)(de)(de)(de)(de)半導體(ti)(ti)產業中(zhong),CZ法是(shi)(shi)常見到(dao)(dao)(dao)的(de)(de)(de)(de)(de)(de)晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti)生(sheng)(sheng)長(chang)(chang)(chang)(chang)法,由于能生(sheng)(sheng)長(chang)(chang)(chang)(chang)出較大(da)(da)直(zhi)(zhi)徑(jing)之晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)體(ti)(ti),所以(yi)大(da)(da)約85%的(de)(de)(de)(de)(de)(de)半導體(ti)(ti)產業都(dou)使(shi)用CZ法來(lai)生(sheng)(sheng)長(chang)(chang)(chang)(chang)單晶(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)(jing)棒(bang)(bang)(bang)。
該方法主要特(te)點:
1)在晶(jing)體生長過程中,可以方(fang)便的觀察晶(jing)體的生長情況;
2) 晶(jing)體在自(zi)由(you)液面生(sheng)長,不受坩堝的強制作用,可降低晶(jing)體的應力;
3) 可以方便的(de)使用所需取向籽晶(jing)和“縮頸”工藝,有助于以比較快的(de)速率(lv)生(sheng)長較高質量的(de)晶(jing)體,晶(jing)體完整性較好;
4) 晶體(ti)、坩堝轉動(dong)引(yin)起的強(qiang)制(zhi)對(dui)流(liu)和重(zhong)力作(zuo)用(yong)引(yin)起的自然對(dui)流(liu)相互作(zuo)用(yong),使(shi)復雜液(ye)流(liu)作(zuo)用(yong)不(bu)可克服,易產生晶體(ti)問題;
5) 機(ji)械擾動在生長大直徑晶體(ti)時容易(yi)使(shi)晶體(ti)產生問題。
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